@misc{indiciae7b88bd3708a1,
  title = {Efficient and compact thermo-optic phase shifter in silicon-rich silicon nitride},
  author = {Hani Nejadriahi and Steve Pappert and Yeshaiahu Fainman and Paul Yu},
  year = {2021},
  doi = {10.1364/ol.431757},
  url = {https://arxiv.org/abs/2106.09476},
  note = {Source identifier: 2106.09476}
}