TY  - RPRT
TI  - Efficient and compact thermo-optic phase shifter in silicon-rich silicon nitride
AU  - Hani Nejadriahi
AU  - Steve Pappert
AU  - Yeshaiahu Fainman
AU  - Paul Yu
PY  - 2021
DO  - 10.1364/ol.431757
UR  - https://arxiv.org/abs/2106.09476
ID  - 2106.09476
ER  -