@misc{indiciaeee413955b9f2,
  title = {Calibration-based overlay sensing with minimal-footprint targets},
  author = {Tom A. W. Wolterink and Robin D. Buijs and Giampiero Gerini and Ewold Verhagen and A. Femius Koenderink},
  year = {2021},
  doi = {10.1063/5.0058307},
  url = {https://arxiv.org/abs/2106.09490},
  note = {Source identifier: 2106.09490}
}