TY  - RPRT
TI  - Calibration-based overlay sensing with minimal-footprint targets
AU  - Tom A. W. Wolterink
AU  - Robin D. Buijs
AU  - Giampiero Gerini
AU  - Ewold Verhagen
AU  - A. Femius Koenderink
PY  - 2021
DO  - 10.1063/5.0058307
UR  - https://arxiv.org/abs/2106.09490
ID  - 2106.09490
ER  -