@misc{indiciae3635a35c8ad9,
  title = {Miniature Plasma Source for In-Situ Scanner Cleaning},
  author = {Mark van de Kerkhof and Edgar Osorio and Vladimir Krivtsun and Maxim Spiridonov and Viacheslav Medvedev and Dmitry Astakhov},
  year = {2021},
  url = {https://arxiv.org/abs/2106.09944},
  note = {Source identifier: 2106.09944}
}