@misc{indiciaecb5de14ddd96,
  title = {Mechanism of electron-beam manipulation of single dopant atoms in silicon},
  author = {Alexander Markevich and Bethany M Hudak and Jacob Madsen and Jiaming Song and Paul C Snijders and Andrew R Lupini and Toma Susi},
  year = {2021},
  doi = {10.1021/acs.jpcc.1c03549},
  url = {https://arxiv.org/abs/2106.13643},
  note = {Source identifier: 2106.13643}
}