TY  - RPRT
TI  - Mechanism of electron-beam manipulation of single dopant atoms in silicon
AU  - Alexander Markevich
AU  - Bethany M Hudak
AU  - Jacob Madsen
AU  - Jiaming Song
AU  - Paul C Snijders
AU  - Andrew R Lupini
AU  - Toma Susi
PY  - 2021
DO  - 10.1021/acs.jpcc.1c03549
UR  - https://arxiv.org/abs/2106.13643
ID  - 2106.13643
ER  -