@misc{indiciae8ee82cb5aa59,
  title = {Ion energy distribution function in very high frequency capacitive discharges excited by sawtooth waveform},
  author = {Sarveshwar Sharma and Nishant Sirse and Animesh Kuley and Miles M Turner},
  year = {2021},
  doi = {10.1063/5.0061605},
  url = {https://arxiv.org/abs/2106.14847},
  note = {Source identifier: 2106.14847}
}