TY  - RPRT
TI  - Ion energy distribution function in very high frequency capacitive discharges excited by sawtooth waveform
AU  - Sarveshwar Sharma
AU  - Nishant Sirse
AU  - Animesh Kuley
AU  - Miles M Turner
PY  - 2021
DO  - 10.1063/5.0061605
UR  - https://arxiv.org/abs/2106.14847
ID  - 2106.14847
ER  -