@misc{indiciae7cffc38aaf30, title = {Investigation of superconducting properties of NbN films deposited by DC magnetron sputtering on high-k dielectric HfO2 buffer layer}, author = {N. V. Porokhov and A. P. Sirotina and E. A. Pershina and M. V. Shibalov and G. D. Diudbin and A. V. Mumlyakov and E. R. Timofeeva and I. V. Trofimov and A. M. Tagachenkov and Yu. V. Anufriev and E. V. Zenova and M. A. Tarkhov}, year = {2021}, doi = {10.1088/1361-6668/ac216a}, url = {https://arxiv.org/abs/2106.15680}, note = {Source identifier: 2106.15680} }