@misc{indiciae482c7d30eb4b,
  title = {Lithography Hotspot Detection via Heterogeneous Federated Learning with Local Adaptation},
  author = {Xuezhong Lin and Jingyu Pan and Jinming Xu and Yiran Chen and Cheng Zhuo},
  year = {2021},
  url = {https://arxiv.org/abs/2107.04367},
  note = {Source identifier: 2107.04367}
}