TY  - RPRT
TI  - Lithography Hotspot Detection via Heterogeneous Federated Learning with Local Adaptation
AU  - Xuezhong Lin
AU  - Jingyu Pan
AU  - Jinming Xu
AU  - Yiran Chen
AU  - Cheng Zhuo
PY  - 2021
UR  - https://arxiv.org/abs/2107.04367
ID  - 2107.04367
ER  -