@misc{indiciae4d062bb075d5,
  title = {Machine Learning based CVD Virtual Metrology in Mass Produced Semiconductor Process},
  author = {Yunsong Xie and Ryan Stearrett},
  year = {2021},
  url = {https://arxiv.org/abs/2107.05071},
  note = {Source identifier: 2107.05071}
}