@misc{indiciaeb1ff936f5e67, title = {Recent advances in Bayesian optimization with applications to parameter reconstruction in optical nano-metrology}, author = {Matthias Plock and Sven Burger and Philipp-Immanuel Schneider}, year = {2021}, doi = {10.1117/12.2592266}, url = {https://arxiv.org/abs/2107.05499}, note = {Source identifier: 2107.05499} }