TY  - RPRT
TI  - Recent advances in Bayesian optimization with applications to parameter reconstruction in optical nano-metrology
AU  - Matthias Plock
AU  - Sven Burger
AU  - Philipp-Immanuel Schneider
PY  - 2021
DO  - 10.1117/12.2592266
UR  - https://arxiv.org/abs/2107.05499
ID  - 2107.05499
ER  -