@misc{indiciae039b42f0f562,
  title = {Reactivity of the Si(100)-2\$\textbackslash{}times\$1-Cl surface with respect to PH\$\_3\$, PCl\$\_3\$, and BCl\$\_3\$: Comparison with PH\$\_3\$ on Si(100)-2\$\textbackslash{}times\$1-H},
  author = {T. V. Pavlova and K. N. Eltsov},
  year = {2021},
  doi = {10.1088/1361-648x/ac1092},
  url = {https://arxiv.org/abs/2107.06168},
  note = {Source identifier: 2107.06168}
}