TY  - RPRT
TI  - Reactivity of the Si(100)-2$\times$1-Cl surface with respect to PH$_3$, PCl$_3$, and BCl$_3$: Comparison with PH$_3$ on Si(100)-2$\times$1-H
AU  - T. V. Pavlova
AU  - K. N. Eltsov
PY  - 2021
DO  - 10.1088/1361-648x/ac1092
UR  - https://arxiv.org/abs/2107.06168
ID  - 2107.06168
ER  -