@misc{indiciae5b95c424ae23, title = {Few pulses femtosecond laser exposure for high efficiency 3D glass micromachining}, author = {Enrico Casamenti and Sacha Pollonghini and Yves Bellouard}, year = {2021}, doi = {10.1364/oe.435163}, url = {https://arxiv.org/abs/2107.11220}, note = {Source identifier: 2107.11220} }