TY  - RPRT
TI  - Few pulses femtosecond laser exposure for high efficiency 3D glass micromachining
AU  - Enrico Casamenti
AU  - Sacha Pollonghini
AU  - Yves Bellouard
PY  - 2021
DO  - 10.1364/oe.435163
UR  - https://arxiv.org/abs/2107.11220
ID  - 2107.11220
ER  -