@misc{indiciae3924af008bca,
  title = {Fabrication and surface treatment of electron-beam evaporated niobium for low-loss coplanar waveguide resonators},
  author = {D. Kowsari and K. Zheng and J. T. Monroe and N. J. Thobaben and X. Du and P. M. Harrington and E. A. Henriksen and D. S. Wisbey and K. W. Murch},
  year = {2021},
  doi = {10.1063/5.0066441},
  url = {https://arxiv.org/abs/2108.05354},
  note = {Source identifier: 2108.05354}
}