@misc{indiciaee13ec26ca21e,
  title = {Reducing strain in heterogeneous quantum devices using atomic layer deposition},
  author = {Oscar W. Kennedy and James O'Sullivan and Christoph W. Zollitsch and Chistopher N. Thomas and Stafford Withington and John J. L. Morton},
  year = {2021},
  url = {https://arxiv.org/abs/2108.05640},
  note = {Source identifier: 2108.05640}
}