TY  - RPRT
TI  - Reducing strain in heterogeneous quantum devices using atomic layer deposition
AU  - Oscar W. Kennedy
AU  - James O'Sullivan
AU  - Christoph W. Zollitsch
AU  - Chistopher N. Thomas
AU  - Stafford Withington
AU  - John J. L. Morton
PY  - 2021
UR  - https://arxiv.org/abs/2108.05640
ID  - 2108.05640
ER  -