@misc{indiciae65a801ef85c5,
  title = {Generating Electron Beam Lithography Write Parameters from the FORTIS Holographic Grating Solution},
  author = {Mackenzie Carlson and Stephan McCandliss and Randall McEntaffer and Fabien Grisé and Nicholas Kruczek and Brian Fleming},
  year = {2021},
  doi = {10.1117/12.2594683},
  url = {https://arxiv.org/abs/2108.09297},
  note = {Source identifier: 2108.09297}
}