TY  - RPRT
TI  - Generating Electron Beam Lithography Write Parameters from the FORTIS Holographic Grating Solution
AU  - Mackenzie Carlson
AU  - Stephan McCandliss
AU  - Randall McEntaffer
AU  - Fabien Grisé
AU  - Nicholas Kruczek
AU  - Brian Fleming
PY  - 2021
DO  - 10.1117/12.2594683
UR  - https://arxiv.org/abs/2108.09297
ID  - 2108.09297
ER  -