@misc{indiciaecba5a89d3473,
  title = {Direct atomic layer deposition of ultrathin aluminium oxide on monolayer \$MoS\_2\$ exfoliated on gold: the role of the substrate},
  author = {Emanuela Schilirò and Raffaella Lo Nigro and Salvatore E. Panasci and Simonpietro Agnello and Marco Cannas and Franco M. Gelardi and Fabrizio Roccaforte and Filippo Giannazzo},
  year = {2021},
  url = {https://arxiv.org/abs/2108.09542},
  note = {Source identifier: 2108.09542}
}