@misc{indiciaee705c44e4b5c,
  title = {Hole in one: Pathways to deterministic single-acceptor incorporation in Si(100)-2\$\textbackslash{}times\$1},
  author = {Quinn Campbell and Andrew D. Baczewski and R. E. Butera and Shashank Misra},
  year = {2021},
  doi = {10.1116/5.0075467},
  url = {https://arxiv.org/abs/2108.10805},
  note = {Source identifier: 2108.10805}
}