@misc{indiciaecb6ecd88d2ae, title = {CMOS back-end-of-line compatible ferroelectric tunnel junction devices}, author = {Veeresh Deshpande and Keerthana Shajil Nair and Marco Holzer and Sourish Banerjee and Catherine Dubourdieu}, year = {2021}, doi = {10.1016/j.sse.2021.108054}, url = {https://arxiv.org/abs/2108.10941}, note = {Source identifier: 2108.10941} }