@misc{indiciaece321bd10b7b,
  title = {Uniform Spin Qubit Devices in an All-Silicon 300 mm Integrated Process},
  author = {N. I. Dumoulin Stuyck and R. Li and C. Godfrin and A. Elsayed and S. Kubicek and J. Jussot and B. T. Chan and F. A. Mohiyaddin and M. Shehata and G. Simion and Y. Canvel and L. Goux and M. Heyns and B. Govoreanu and I. P. Radu},
  year = {2021},
  doi = {10.23919/vlsicircuits52068.2021.9492427},
  url = {https://arxiv.org/abs/2108.11317},
  note = {Source identifier: 2108.11317}
}