@misc{indiciae002f6c4e4182, title = {Coarse-grained approach to amorphous and anisotropic materials in Kinetic Monte Carlo thin-films growth simulations: a case study of TiO2 and ZnO by Plasma Enhanced Chemical Vapor Deposition}, author = {Jorge Budagosky and Xabier Garcia-Casas and Juan R. Sanchez-Valencia and Angel Barranco and Ana Borras}, year = {2021}, url = {https://arxiv.org/abs/2108.12407}, note = {Source identifier: 2108.12407} }