@misc{indiciae6de376e37bb4,
  title = {An efficient plasma-surface interaction surrogate model for sputtering processes based on autoencoder neural networks},
  author = {Tobias Gergs and Borislav Borislavov and Jan Trieschmann},
  year = {2021},
  doi = {10.1116/6.0001485},
  url = {https://arxiv.org/abs/2109.01406},
  note = {Source identifier: 2109.01406}
}