TY  - RPRT
TI  - An efficient plasma-surface interaction surrogate model for sputtering processes based on autoencoder neural networks
AU  - Tobias Gergs
AU  - Borislav Borislavov
AU  - Jan Trieschmann
PY  - 2021
DO  - 10.1116/6.0001485
UR  - https://arxiv.org/abs/2109.01406
ID  - 2109.01406
ER  -