@misc{indiciae887438575973,
  title = {Very high frequency probes for atomic force microscopy with silicon optomechanics},
  author = {L Schwab and P Allain and N Mauran and X Dollat and L Mazenq and D Lagrange and M Gély and S Hentz and G Jourdan and I Favero and B Legrand},
  year = {2021},
  url = {https://arxiv.org/abs/2109.02478},
  note = {Source identifier: 2109.02478}
}