@misc{indiciaefec20f33ee75,
  title = {Impact of Stoichiometric Silicon Nitride Growth Conditions on Dispersion Engineering of Broadband Microresonator Frequency Combs},
  author = {Gregory Moille and Daron Westly and Gregory Simelgor and Kartik Srinivasan},
  year = {2021},
  url = {https://arxiv.org/abs/2109.03291},
  note = {Source identifier: 2109.03291}
}