TY  - RPRT
TI  - Impact of Stoichiometric Silicon Nitride Growth Conditions on Dispersion Engineering of Broadband Microresonator Frequency Combs
AU  - Gregory Moille
AU  - Daron Westly
AU  - Gregory Simelgor
AU  - Kartik Srinivasan
PY  - 2021
UR  - https://arxiv.org/abs/2109.03291
ID  - 2109.03291
ER  -