@misc{indiciaeb8b943a3fa9f, title = {Preliminary Synthesis of Carbon Nitride Thin Films by N\$\_2\$/CH\$\_4\$ Microwave Plasma Assisted Chemical Vapour Deposition: Characterisation of the Discharge and the Obtained Films}, author = {Paul Kouakou and Valerie Brien and Badreddine Assouar and Virginie Hody and Mohammed Belmahi and Henri Migeon and Jamal Bougdira}, year = {2021}, doi = {10.1002/ppap.200730703}, url = {https://arxiv.org/abs/2109.04777}, note = {Source identifier: 2109.04777} }