TY  - RPRT
TI  - Preliminary Synthesis of Carbon Nitride Thin Films by N$_2$/CH$_4$ Microwave Plasma Assisted Chemical Vapour Deposition: Characterisation of the Discharge and the Obtained Films
AU  - Paul Kouakou
AU  - Valerie Brien
AU  - Badreddine Assouar
AU  - Virginie Hody
AU  - Mohammed Belmahi
AU  - Henri Migeon
AU  - Jamal Bougdira
PY  - 2021
DO  - 10.1002/ppap.200730703
UR  - https://arxiv.org/abs/2109.04777
ID  - 2109.04777
ER  -