@misc{indiciae92be82553092,
  title = {The Design and Simulation of a Coarse-to-Fine Optical MEMS Accelerometer},
  author = {Mojtaba Rahimi and Majid Taghavi and Mohammad Malekmohammad},
  year = {2023},
  doi = {10.1364/ao.432936},
  url = {https://arxiv.org/abs/2109.09449},
  note = {Source identifier: 2109.09449}
}