TY  - RPRT
TI  - The Design and Simulation of a Coarse-to-Fine Optical MEMS Accelerometer
AU  - Mojtaba Rahimi
AU  - Majid Taghavi
AU  - Mohammad Malekmohammad
PY  - 2023
DO  - 10.1364/ao.432936
UR  - https://arxiv.org/abs/2109.09449
ID  - 2109.09449
ER  -