@misc{indiciaeca7acdd80935,
  title = {Mitigation of substrate coupling effects in RF switch by localized substrate removal using laser processing},
  author = {Arun Bhaskar and Justine Philippe and Etienne Okada and Flavie Braud and Jean-François Robillard and Cédric Durand and Frédéric Gianesello and Daniel Gloria and Christophe Gaquière and Emmanuel Dubois},
  year = {2021},
  url = {https://arxiv.org/abs/2109.09452},
  note = {Source identifier: 2109.09452}
}