@misc{indiciae2a0e46dda44d,
  title = {Talbot photolithography optimization with engineered hybrid metal-dielectric mask: High-contrast and highly-uniform Talbot stripes},
  author = {Yu. E. Geints and I. V. Minin and O. V. Minin},
  year = {2021},
  doi = {10.1016/j.optlastec.2021.107776},
  url = {https://arxiv.org/abs/2109.10904},
  note = {Source identifier: 2109.10904}
}