@misc{indiciae97acdcb2c461, title = {Design, Fabrication, Characterization and Reliability Study of CMOS-MEMS Lorentz-Force Magnetometers}, author = {Juan Valle and Josep-María Sánchez-Chiva and Daniel Fernández and Jordi Madrenas}, year = {2021}, url = {https://arxiv.org/abs/2109.10980}, note = {Source identifier: 2109.10980} }