TY  - RPRT
TI  - Design, Fabrication, Characterization and Reliability Study of CMOS-MEMS Lorentz-Force Magnetometers
AU  - Juan Valle
AU  - Josep-María Sánchez-Chiva
AU  - Daniel Fernández
AU  - Jordi Madrenas
PY  - 2021
UR  - https://arxiv.org/abs/2109.10980
ID  - 2109.10980
ER  -