@misc{indiciae7f897cb39eff,
  title = {Surface chemistry models for GaAs epitaxial growth and hydride cracking using reacting flow simulations},
  author = {Malik Hassanaly and Hariswaran Sitaraman and Kevin L. Schulte and Aaron J. Ptak and John Simon and Kevin Udwary and Jacob H. Leach and Heather Splawn},
  year = {2021},
  doi = {10.1063/5.0061222},
  url = {https://arxiv.org/abs/2109.11540},
  note = {Source identifier: 2109.11540}
}