@misc{indiciaecaf7e48d67e4,
  title = {Tuning of Silicon Nitride Micro Cavities by Controlled Nanolayer Deposition},
  author = {Dmitry A. Kalashnikov and Gandhi Alagappan and Ting Hu and Nelson Lim and Victor Leong and Ching Eng Png and Leonid A. Krivitsky},
  year = {2021},
  url = {https://arxiv.org/abs/2109.12991},
  note = {Source identifier: 2109.12991}
}