TY  - RPRT
TI  - Tuning of Silicon Nitride Micro Cavities by Controlled Nanolayer Deposition
AU  - Dmitry A. Kalashnikov
AU  - Gandhi Alagappan
AU  - Ting Hu
AU  - Nelson Lim
AU  - Victor Leong
AU  - Ching Eng Png
AU  - Leonid A. Krivitsky
PY  - 2021
UR  - https://arxiv.org/abs/2109.12991
ID  - 2109.12991
ER  -