@misc{indiciaeabcd2ca56cf9,
  title = {The effects of ion implantation damage to photonic crystal optomechanical resonators in silicon},
  author = {Cliona Shakespeare and Teemu Loippo and Henri Lyyra and Juha T. Muhonen},
  year = {2021},
  url = {https://arxiv.org/abs/2109.13856},
  note = {Source identifier: 2109.13856}
}