TY  - RPRT
TI  - The effects of ion implantation damage to photonic crystal optomechanical resonators in silicon
AU  - Cliona Shakespeare
AU  - Teemu Loippo
AU  - Henri Lyyra
AU  - Juha T. Muhonen
PY  - 2021
UR  - https://arxiv.org/abs/2109.13856
ID  - 2109.13856
ER  -