@misc{indiciae55cd3ea461f4,
  title = {Molecular Dynamics Study on the Role of Ar Ions in the Sputter Deposition of Al Thin Films},
  author = {Tobias Gergs and Thomas Mussenbrock and Jan Trieschmann},
  year = {2022},
  doi = {10.1063/5.0098040},
  url = {https://arxiv.org/abs/2110.00356},
  note = {Source identifier: 2110.00356}
}