TY  - RPRT
TI  - Molecular Dynamics Study on the Role of Ar Ions in the Sputter Deposition of Al Thin Films
AU  - Tobias Gergs
AU  - Thomas Mussenbrock
AU  - Jan Trieschmann
PY  - 2022
DO  - 10.1063/5.0098040
UR  - https://arxiv.org/abs/2110.00356
ID  - 2110.00356
ER  -