@misc{indiciaeb0b3f734ef0f,
  title = {Super-Resolution Nanolithography of Two-Dimensional Materials by Anisotropic Etching},
  author = {Dorte R. Danielsen and Anton Lyksborg-Andersen and Kirstine E. S. Nielsen and Bjarke S. Jessen and Timothy J. Booth and Manh-Ha Doan and Yingqiu Zhou and Peter Bøggild and Lene Gammelgaard},
  year = {2021},
  doi = {10.1021/acsami.1c09923},
  url = {https://arxiv.org/abs/2110.03499},
  note = {Source identifier: 2110.03499}
}